Comprehensive mobility study of silicon nanowire transistors using multi-subband models
نویسندگان
چکیده
Abstract Spatial confinement is important in advanced More Moore devices, such as nanowire transistors (NWTs), where the basic charge transport properties must be revised beyond bulk crystal assumptions. This work presents a comprehensive and general overview of electron mobility aggressively-scaled Si NWTs order to demonstrate effect quantum on this topic, establishing its dependence numerous physical factors (shape, diameter, orientation). The evaluation makes use unique simulation framework innovative multi-subband calculations scattering rates. We show that (1) surface roughness more pronounced at higher sheet densities, (2) ionized impurity seriously degrades highly-doped NWTs, (3) cross-section shape affects directly subband parameters mobility, with elliptical giving best performance for same cross-sectional area.
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ژورنال
عنوان ژورنال: Nano express
سال: 2023
ISSN: ['2632-959X']
DOI: https://doi.org/10.1088/2632-959x/acdb8a